JPH056662Y2 - - Google Patents

Info

Publication number
JPH056662Y2
JPH056662Y2 JP1985136712U JP13671285U JPH056662Y2 JP H056662 Y2 JPH056662 Y2 JP H056662Y2 JP 1985136712 U JP1985136712 U JP 1985136712U JP 13671285 U JP13671285 U JP 13671285U JP H056662 Y2 JPH056662 Y2 JP H056662Y2
Authority
JP
Japan
Prior art keywords
wafer
chuck table
semiconductor wafer
center
photo sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985136712U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245829U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985136712U priority Critical patent/JPH056662Y2/ja
Publication of JPS6245829U publication Critical patent/JPS6245829U/ja
Application granted granted Critical
Publication of JPH056662Y2 publication Critical patent/JPH056662Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985136712U 1985-09-06 1985-09-06 Expired - Lifetime JPH056662Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985136712U JPH056662Y2 (en]) 1985-09-06 1985-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985136712U JPH056662Y2 (en]) 1985-09-06 1985-09-06

Publications (2)

Publication Number Publication Date
JPS6245829U JPS6245829U (en]) 1987-03-19
JPH056662Y2 true JPH056662Y2 (en]) 1993-02-19

Family

ID=31040082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985136712U Expired - Lifetime JPH056662Y2 (en]) 1985-09-06 1985-09-06

Country Status (1)

Country Link
JP (1) JPH056662Y2 (en])

Also Published As

Publication number Publication date
JPS6245829U (en]) 1987-03-19

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